Catalog

G Series Coils Features and Benefits

SUPERIOR CHEMICAL RESISTANCE:
- Wide variety of materials available for use in heating or cooling applications for alkaline or acid solutions and rinse tanks. Check solution guide or consult with your chemical supplier for proper sheath material.

RUGGED CONSTRUCTION:
- Heavy wall, 20-gauge metal tubing available in 316 stainless steel and titanium.
- 1" diameter tubing and 1" MNPT connection fittings standard.

OUTSTANDING PERFORMANCE:
- 2-inch thick, low profile design.
- Every inch of coil surface is active exchange area.

LEAK-FREE OPERATION:
- Integral inlet and outlet manifolds for single point connections greatly reduce the potential for leaks and simplifies installation.

HIGH PRESSURE RATING:
- 100 PSI working pressure (steam or water).

SIZES:
4.6 square foot to 89.9 square foot of exchange area.

OPTIONS AVAILABLE (consult factory):
- Mounting hangers.
- Special sizes.
- Vertical or horizontal configurations.
- Heavier gauge tubing or pipe.
- Special riser sizes, fittings, lengths, and configurations.
- Anti-floatation weights recommended for high specific gravity or highly viscous solutions.
- Zirconium, Hastelloy C and other alloys available.
- Fluoropolymer coatings for protection at solution/atmospheric interface.
- Vacuum breakers.
- Non-conductive isolator couplings.
- High pressure ratings available (consult factory).

NOTE: Inlet and outlet comnnections must be sized to adequately handle water and steam volume requirements.
Generally, larger inlet sizes are needed for grid coils larger than 33 sq. ft. (for steam) and 25 sq. ft. (for water).

Consult factory for inlet/outlet sizing assistance.

ORDERING EXAMPLE: T8G-24HS-BB-R30 - T=Titanium, 8 Tubes, G=Grid Style, 24" Length, H=Horizontal Configuration, S=Steam Usage, B=1" MNPT Inlet/Outlet, R=30" Risers.

Serpentine coil heaters offer lower cost per heating surface area. The design allows them to be installed in tanks with limited space. Bottom coils available. Hastelloy C and Zirconium coils available (consult factory). 1" diameter tubing with 1" MNPT fittings standard. 1/2", 5/8" and 3/4"tubing available. PTFE coatings for protection at solution/atmospheric interface available.

STANDARD ORDERING EXAMPLE: SP4-48T-R22-BB - SP=Serpentine Coil, 4 Passes, 48" Length, T=Titanium, R=22" Risers, B=1" Inlet, B=1" Outlet.

LOW PROFILE (LP) ORDERING EXAMPLE: SP4-48T-LP-R22-BB - SP=Serpentine Coil, 4 Passes, 48" Length, T=Titanium, LP=Low Profile Configuration, R=22" Risers, B=1" Inlet, B=1" Outlet.

Robust Design

Eliminates stray currents in tanks. Excellent chemical compatibility and rugged design for your heating or cooling application. All wetted parts of fluoropolymer (FEP, PFA or PTFE) construction with a heavy duty CPVC mounting bracket. Standard coils are FEP and rated up to 30 PSI steam service. PFA coils are available for steam service up to 60 PSI. 10 PSI minimum steam pressure required for operation. Heavy wall tubing improves circulations and reduces pressure drop. Heavy duty CPVC mounting bracket and 1/8-inch thick perforated guard helps protect the coil from damage. Integral inlet/outlet connections reduce potential for leaks. 10 PSI minimum steam pressure required for operation. Vacuum breakers recommended for fluoropolymer heat coil steam heating installations.

Maximum single circuit capacity 76 fluid ounces (2.2 liters). Temperature range: -60°F (-50°C) to 480°F (250°C)

Seven sizes from 1.1 ft² (.10 m²) to 15 ft² (1.4 m²). Compact cylinders from 3” (70mm) x 6” (158mm) to 5” (120mm) x 20” (515mm).

Applications
* Semiconductor Wafer Cleaning

SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies.

The newest Process Technology inline solvent heater. SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies. Chemistry contained within high-purity PTFE components – no contact with any metals. Supports recirculating and single pass flow requirements. This is the ultimate in high-purity solvent heating! Ask about our customized to your tool and explosion proof design (SHX-EX) options. Heats up to 90°C (194°F)

Applications
* Semiconductor Wafer Cleaning
* Flammable Solvent Heating
* Acid Heating and Corrosive Chemical Heating
* UltraHigh Purity Heating
* Chemical Heating

New - Small footprint chemical heater

Best-in-class for heating wet-process chemistries. Designed to support advanced Ultra-High-Purity (UHP) requirements. ChemHeat PTFE flow path utilizes all fluoropolymer (PTFE) wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications. Engineered for safety and reliability. Compact to fit into existing environments. Fast heat-up. Clean room assembled. Heats up to 120C (248F)

Applications
* Semiconductor Wet Processes
* Filtration
* Sterilization/Cleaning
* Surface Finishing

Superior indirect heating

The SHB/SHC, a low wattage inline chemical/solvent heater, delivers superior indirect heating with temperature stability. Using multiple temperature sensors and self-limiting technology, this heater ensures safe operation during low or no-flow conditions. SHB series: Electropolished 316SS for solvents. SHC series: PTFE & PFA wetted surfaces for acids and solvents. Heats up to 180C (356F)

Applications
* Semiconductor Wafer Cleaning
* Etching
* Inline Chemical Heating
* Point of Use Heating (POU)

Outstanding heater performance

Frontier is designed for heating chemicals and solvents in hazardous operating environments. Suitable for heating a wide variety of flammable and non-flammable chemistries using electropolished stainless steel wetted materials for improved cleanliness. Offers outstanding performance over a wide range of flow and temperature requirements. Heat source isolated from flammable chemistries. Certified to UL823 compliant and ATEX. Suitable for Class l, Div 2 and Zone 1 & 2 hazardous environments. Available up to 36kW, the Frontier is the most powerful inline solvent heater available. Up to 180C (356F)

Applications
* Semiconductor
* Sterilization/Cleaning
* Electroless Nickel Plating

Best-in-class chemical heater

The TIH offers unmatched performance and reliability with the ability to heat a variety of chemicals
up to 210°C. This heater is suitable for either single pass or recirculating applications. Delivers best-in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available!

Applications
* Semiconductor wafer cleaning
* Solar/Photovoltaio Wafer Cleaning
* Inline chemical heating

Minimal footprint quartz heating

The HCQ Quartz Inline Heater provides a minimal footprint, space-conscious design combined with
ultra-pure, high-purity 100% quartz construction. The Isolated heating element virtually eliminates
process contamination while multiple plumbing configurations ensure ease of operation.

Applications
* Semiconductor Wafer Cleaning

Reduced cost of ownership!

The LTFH Series Filter Housing is designed for continuous filtering of high-temperature corrosive chemicals and delivers superior field service life because it is reusable, so only the filter cartridge needs to be replaced. Spin-on ring assembly not only ensures a positive seal every time, but it also enables quick and easy cartridge replacement with no damage to the housing o-ring. Housing collar retainer ring and filter cartridge clip substantially reduce cartridge maintenance clearance space. Exceptional chemical compatibility: 100% PTFE fluoropolymer wetted surfaces are compatible with virtually all chemistries. Heats up to 180C (356F)

Ultra-high purity heat exchanger

With a PFA tube-side fluid path the XC Series will meet the most stringent cleanliness requirements to support the next generation semiconductor node technologies. Compact design. Ideal for one-pass cooling of chemicals dumping to waste stream and innovatively eliminates high costs associated with water aspiration. Less surface area required for same BTU exchange compared to most other fluoropolymer exchangers. Temperature range: -50C (-60F) to 150C (302F)

Applications
* Semiconductor Wafer Cleaning

Ultra-high purity, high-flow heat exchanger

The XC Inline Heat Exchanger is now available with a high-flow option that provides the same heat transfer performance as before but now with a reduced fluid pressure drop. With a PFA tube-side fluid path the XC Series will meet the most stringent cleanliness requirements to support next-generation ultra-high-purity (UHP) semiconductor node technologies. This exchanger supports both recirculating and single pass flow applications. Heats up to 135C (275F)

Application
* Semiconductor Wafer Cleaning

Multi-loop chemical heater

Engineered for your process - manage multiple chambers with one precise and stable heater! Building off of the popular SHC product line, the Nexus incorporates the same safe indirect heating technology to heat multiple process loops. Using a single heat source, the Nexus improves chamber-temperature matching performance for advanced processing requirements. PFA wetted surfaces. Low-watt density design for lower surface temperatures. Heats up to 80°C (176°F)

Applications
* Semiconductor Wafer Cleaning
* Point of Use Heating (POU)